A complication of the tasks solving by the modem radliolocation, radionavigation and communication systems connected with the demand promotion to the resolution and accuracy of coordinates definition and increase in the volumes of transmitted information in satellite communication systems has resulted in boisterous mastering of millimeter wave bands. Success in microwave technology reached in 80' allowed such leading instrument developing companies as Hewlett Packard; EIP, lB millimeter etc. to set up an output of mm- and submm-wave bands devices and systems. It has streamlined Scientific Technological Progress in several spheres, since millimeter, through infra-red frequency range was closed to researchers for a long period of time because of the absence of necessary equipment. At present microwave devices of the short-wave part of mm- wave band and of submm- wave bands are used not only in radiolocation and communications. Unique diagnostic systems based on the analysis of the radiation parameters of different microwave sources were created. They have their application in medicine, thermonuclear energetics, radioastronomy, biology, nuclear physics, the physics of the solid state body, geology, etc. The above circumstances caused the beginning of the measuring microwave technology researches in 60 to 600 GHz frequency range: generators, power and frequency meters, spectrum analyzers. The task of working out equipment and techniques of the effective control as well as frequency and intensity measurements of the microwave signals in the investigated range is of the special interest. Here are some examples. The creation of a thermonuclear reactor in ITER project is considered to be the project of the century in the energetics sphere. One of the basic engineering tasks in the course of project realization is the creation of the diagnostic equipment realizing in real time spectrum analysis of thermonuclear plasma radiation at the so called cyclotron hannonics. Such
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